Nanocharacterization and Scanning Probe Microscopy Platform

Research Staff: 3 Engineers/Technician,
20 researchers and 40 PhD students
High level equipment:  4 M€
Open to the External community


With the continuous scale decrease at the heart of device processes, material growth and structure synthesis, scanning probe microscopy is the answer to the needs of the research groups for a 3 dimensional nanoscale imaging tool, complementary to the conventional imaging techniques. Additionally, this technique provides physical characterization (electrical, mechanical, chemical,..) of  new materials, nanostructures and devices at the nanometer scale.

  • Material growth and Technologic Process Control
  • Materials and Nanostructures Characterization


4 ambient and atmosphere controlled Atomic Force Microscopes

  • High resolution topography (small sample)
  • Large sample and large scan (100µm)
  • Physical and electrical mode detection
    • Non contact mode : Magnetic force and Electrostatic force, Surface potentiel Kelvin probe
    • Contact mode: Conductive AFM, Piezoforce, Mechanical Elasticity and Adhésion force analysis
  • Nanoindentation, Nanolithography
  • Epifluorescence coupling (biologic marking)

4 UHV and Low Temperature Microscopes

  • STM, AFM and four probes (transport measurement)
  • Atomic resolution
  • Electronic  state density spectroscopy
  • Surface preparation and reconstruction
  • P < 10-10 mb
  • 5K, 77K and 30K-1000K